| 000 | 00624nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9783908450610 | ||
| 082 | _a621.38152 TOM | ||
| 245 | 0 | _aBeam Injection Assessment of Microstructures in Semiconductors : BIAMS 2000 : proceedings of the 6th international workshop on Beam Injection Assessment of Microstructures in Semiconductors held in Fukuoka, Japan, November 12-16, 2000 | |
| 260 |
_aUetikon-Zuerich, Switzerland: _bScitec Publications, _c2001 |
||
| 300 | _axiii, 441 p. : ill. ; 25 cm | ||
| 650 | _aSemiconductors - Defects - Congresses | ||
| 700 | _aTomokage, Hajime | ||
| 999 |
_c27305 _d27305 |
||