| 000 | 00605nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9783908450399 | ||
| 082 | _a621.38152 KIT | ||
| 245 | 0 | _aBeam injection assessment of defects in semiconductors : proceedings of the 5th international workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98), held in Park hotel Schloss Wulkow near Berlin, Germany, August 30-september 3, 1998 | |
| 260 |
_aHampshire, USA: _bScitec Publications, _c1998 |
||
| 300 | _axiv, 537 p. : ill. ; 24 CM. | ||
| 650 | _aEngineering | ||
| 700 | _aBreitenstein, O | ||
| 999 |
_c27304 _d27304 |
||