000 00420nam a2200157Ia 4500
008 211224s9999 xx 000 0 und d
020 _a9780750304955
082 _a621.55 CHA
100 _aChambers, A
245 0 _aBasic vacuum technology
250 _a2nd ed
260 _aBristol:
_bInstitute of Physics Pub,
_c1998
300 _axiv, 189 p. : ill. ; 26 cm.
650 _aVacuum technology
700 _aFitch, R. K
999 _c26847
_d26847