| 000 | 00355nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780444516169 | ||
| 082 | _a621.381 BAO | ||
| 100 | _aBao, Minhang | ||
| 245 | 0 | _aAnalysis and design principles of mems devices | |
| 260 |
_aAmsterdam, _c2005 |
||
| 300 | _axii, 312 p. : ill. ; 24 cm | ||
| 650 | _amems | ||
| 999 |
_c18237 _d18237 |
||