| 000 | 00422nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9781402080203 | ||
| 082 | _a671.35 JOH | ||
| 100 | _aJohnstone, Robert W | ||
| 245 | 3 | _aAn introduction to surface-micromachining | |
| 260 |
_aBoston: _bKluwer Academic Publishers, _c2004 |
||
| 300 | _ax, 186 p. : ill. ; 25 cm | ||
| 650 | _aMicromachining | ||
| 700 | _aParameswaran, M | ||
| 999 |
_c17854 _d17854 |
||