| 000 | 00424nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780306478581 | ||
| 082 | _a621.381531 SOT | ||
| 245 | 0 | _aAlternative lithography : unleashing the potentials of nanotechnology | |
| 260 |
_aBoston: _bKluwer Academic/Plenum, _c2003 |
||
| 300 | _axx, 333 p. : ill. ; 26 cm | ||
| 650 | _aMicrolithography | ||
| 700 | _aSotomayor Torres, C. M | ||
| 999 |
_c15317 _d15317 |
||