| 000 | 00481nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780819480514 | ||
| 082 | _a621.381531 HER | ||
| 245 | 0 | _aAlternative lithographic technologies II : 23-25 February 2010, San Jose, California, United States | |
| 260 |
_aBellingham, Wash: _bSPIE, _c2010 |
||
| 300 | _a1 v. (various pagings) : ill. ; 28 cm | ||
| 650 | _aExtreme ultraviolet lithography - Congresses | ||
| 700 | _aHerr, Daniel J. C | ||
| 999 |
_c15316 _d15316 |
||