| 000 | 00467nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780819452894 | ||
| 082 | _a686.2325 STU | ||
| 245 | 0 | _aAdvances in resist technology and processing XXI : 23-24 February 2004, Santa Clara, California, USA | |
| 260 |
_aBellingham, Wash: _bSPIE, _c2004 |
||
| 300 | _a2 v. (xxxviii, 1288 p.) : ill. ; 28 cm | ||
| 650 | _aMicrolithography - Congresses | ||
| 700 | _aSturtevant, John L | ||
| 999 |
_c12347 _d12347 |
||