| 000 | 00454nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780819448446 | ||
| 082 | _a621.381531 FED | ||
| 245 | 0 | _aAdvances in resist technology and processing XX : 24-26 February, 2003, Santa Clara, California, USA | |
| 260 |
_aBellingham, Wash: _bSPIE, _c2003 |
||
| 300 | _a2 v. : ill. ; 28 cm | ||
| 650 | _aMicrolithography - Congresses | ||
| 700 | _aFedynyshyn, Theodore H | ||
| 999 |
_c12346 _d12346 |
||