| 000 | 00437nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780819436177 | ||
| 082 | _a686.2325 HOU | ||
| 100 | _aHoulihan, Francis M | ||
| 245 | 0 | _aAdvances in resist technology and processing XVII : 28 February-1 march, 2000, Santa Clara, USA | |
| 260 |
_aBellingham, WA: _bSPIE, _c2000 |
||
| 300 | _axvii, 618 p. : ill. ; 29 cm | ||
| 650 | _aMicrolithography | ||
| 999 |
_c12344 _d12344 |
||