| 000 | 00381nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780819427786 | ||
| 082 | _a670 CON | ||
| 100 | _aWill, Conley | ||
| 245 | 0 | _aAdvances in resist technology and processing XV | |
| 260 |
_aBellingham, WA: _bSPIE, _c1998 |
||
| 300 | _av.3333. xiv, (1464) p. ; 30 cm | ||
| 650 | _aResist technology | ||
| 999 |
_c12343 _d12343 |
||