| 000 | 00506nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780819450661 | ||
| 082 | _a522.6863 KHO | ||
| 245 | 0 | _aAdvances in mirror technology for x-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA | |
| 260 |
_aBellingham, Wash: _bSPIE, _c2004 |
||
| 300 | _aix, 222 p. : ill. (some col.) ; 28 cm | ||
| 650 | _aExtreme ultraviolet lithography - Congresses | ||
| 700 | _aDinger, Udo | ||
| 999 |
_c12195 _d12195 |
||