| 000 | 00461nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780819468529 | ||
| 082 | _a681.25 ASS | ||
| 245 | 0 | _aAdvances in metrology for x-ray and EUV optics II : 30 August 2007, San Diego, California, USA | |
| 260 |
_aBellingham, Wash: _bSPIE, _c2007 |
||
| 300 | _a1 v. (various pagings) : ill. ; 28 cm | ||
| 650 | _aLaser interferometers - Congresses | ||
| 700 | _aAssoufid, Lahsen | ||
| 999 |
_c12183 _d12183 |
||