| 000 | 00422nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780819438997 | ||
| 082 | _a621.38152 HAR | ||
| 245 | 0 | _aAdvanced microelectronic processing techniques : 28-30 November 2000, Singapore | |
| 260 |
_aBellingham, Wash: _bSPIE, _c2000 |
||
| 300 | _axix, 212 p. : ill. ; 28 cm | ||
| 650 | _aEpitaxy - Congresses | ||
| 700 | _aGupta, Subhash | ||
| 999 |
_c11537 _d11537 |
||