| 000 | 00401nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780071626231 | ||
| 082 | _a621.381046 LAU | ||
| 100 | _aLau, John H | ||
| 245 | 0 | _aAdvanced MEMS packaging | |
| 260 |
_aNew York: _bMcGraw Hill, _c2010 |
||
| 300 | _axxiii, 552 p. : ill. ; 24 cm | ||
| 650 | _aMicroelectromechanical systems | ||
| 700 | _aAibin, Yu | ||
| 999 |
_c11530 _d11530 |
||