| 000 | 00516nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211224s9999 xx 000 0 und d | ||
| 020 | _a9780819479877 | ||
| 082 | _a620.5 SCH | ||
| 245 | 0 | _aAdvanced fabrication technologies for micro/nano optics and photonics III : 25-27 January 2010, San Francisco, California, United States | |
| 260 |
_aBellingham, Wash: _bSPIE, _c2010 |
||
| 300 | _a1 v. (various pagings) : ill. ; 27 cm | ||
| 650 | _aMicroelectromechanical systems - Congresses | ||
| 700 | _aSchoenfeld, Winston V | ||
| 999 |
_c11396 _d11396 |
||