000			00498nam a2200133Ia 4500
008			211224s9999 xx 000 0 und d
020			_a9780819470584
082			_a621.36 SUL
245		0	_aAdvanced fabrication technologies for micro/nano optics and photonics : 21-23 January 2008, San Jose, California, USA
260			_aBellingham, Wash: _bSPIE, _c2008
300			_a1 v. (various pagings) : ill. ; 28 cm
650			_aMicroelectromechanical systems - Congresses
700			_aSchoenfeld, Winston V
999			_c11394 _d11394