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Advances in resist technology and processing XXI : 23-24 February 2004, Santa Clara, California, USA

Contributor(s): Material type: TextTextPublication details: Bellingham, Wash: SPIE, 2004Description: 2 v. (xxxviii, 1288 p.) : ill. ; 28 cmISBN:
  • 9780819452894
Subject(s): DDC classification:
  • 686.2325 STU
Item type:
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