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Advanced microlithography technologies : 8-10 November, 2004, Beijing, China

Contributor(s): Material type: TextTextPublication details: Bellingham, Wash: SPIE, 2005Description: xi, 380 p. : ill. ; 28 cmISBN:
  • 9780819456007
Subject(s): DDC classification:
  • 621.381531 WAN
Item type:
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