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Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA by
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: Bellingham, Wash: SPIE, 2005
Availability: Items available for loan: ACL (1)Call number: 621.381 LIE.

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2.
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA by
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: Bellingham, Wash: SPIE, 2004
Availability: Items available for loan: ACL (1)Call number: 621.381 LIE.

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