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Advanced microelectronic processing techniques : 28-30 November 2000, Singapore

Contributor(s): Material type: TextTextPublication details: Bellingham, Wash: SPIE, 2000Description: xix, 212 p. : ill. ; 28 cmISBN:
  • 9780819438997
Subject(s): DDC classification:
  • 621.38152 HAR
Item type:
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