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1.
Advances in resist technology and processing XX : 24-26 February, 2003, Santa Clara, California, USA by
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: Bellingham, Wash: SPIE, 2003
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2.
Advances in resist technology and processing XIX : 4-6 March, 2002, Santa Clara, [California] USA by
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: Bellingham, Wash: SPIE, 2002
Availability: No items available.

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