Beam injection assessment of defects in semiconductors : proceedings of the 5th international workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98), held in Park hotel Schloss Wulkow near Berlin, Germany, August 30-september 3, 1998

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TextPublication details: Hampshire, USA: Scitec Publications, 1998Description: xiv, 537 p. : ill. ; 24 CMISBN:

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