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Advances in resist materials and processing technology XXVII : 22-24 February 2010, San Jose, California, United States

Contributor(s): Material type: TextTextPublication details: Bellingham, Wash: SPIE, 2010Description: 2 v. (various pagings) : ill. ; 28 cmISBN:
  • 9780819480538
Subject(s): DDC classification:
  • 621.381531 ALL
Item type:
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