TY  - BOOK
AU  - Breitenstein, O
TI  - Beam injection assessment of defects in semiconductors : proceedings of the 5th international workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98), held in Park hotel Schloss Wulkow near Berlin, Germany, August 30-september 3, 1998
SN  - 9783908450399
U1  - 621.38152 KIT 
PY  - 1998///
CY  - Hampshire, USA
PB  - Scitec Publications
KW  - Engineering
ER  -