Beam injection assessment of defects in semiconductors : proceedings of the 5th international workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98), held in Park hotel Schloss Wulkow near Berlin, Germany, August 30-september 3, 1998 

 - Hampshire, USA:  Scitec Publications,  1998 
 - xiv, 537 p. : ill. ; 24 CM. 
<br/><br/><label>ISBN: </label>9783908450399 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering
<br/><br/><label>Dewey Class. No.: </label>621.38152 KIT