Bao, Minhang <br/><br/>
Analysis and design principles of mems devices 

 - Amsterdam,  2005 
 - xii, 312 p. : ill. ; 24 cm 
<br/><br/><label>ISBN: </label>9780444516169 
<br/><br/><label>Subjects--Topical Terms: </label><br/>mems
<br/><br/><label>Dewey Class. No.: </label>621.381 BAO