TY  - BOOK
AU  - Johnstone, Robert W
AU  - Parameswaran, M
TI  - An introduction to surface-micromachining
SN  - 9781402080203
U1  - 671.35 JOH 
PY  - 2004///
CY  - Boston
PB  - Kluwer Academic Publishers
KW  - Micromachining
ER  -