Johnstone, Robert W <br/><br/>
An introduction to surface-micromachining 

 - Boston:  Kluwer Academic Publishers,  2004 
 - x, 186 p. : ill. ; 25 cm 
<br/><br/><label>ISBN: </label>9781402080203 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Micromachining
<br/><br/><label>Dewey Class. No.: </label>671.35 JOH