TY  - BOOK
AU  - Sotomayor Torres, C. M
TI  - Alternative lithography : unleashing the potentials of nanotechnology
SN  - 9780306478581
U1  - 621.381531 SOT 
PY  - 2003///
CY  - Boston
PB  - Kluwer Academic/Plenum
KW  - Microlithography
ER  -