Alternative lithography : unleashing the potentials of nanotechnology 

 - Boston:  Kluwer Academic/Plenum,  2003 
 - xx, 333 p. : ill. ; 26 cm 
<br/><br/><label>ISBN: </label>9780306478581 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography
<br/><br/><label>Dewey Class. No.: </label>621.381531 SOT