TY - BOOK AU - Herr, Daniel J. C TI - Alternative lithographic technologies II : 23-25 February 2010, San Jose, California, United States SN - 9780819480514 U1 - 621.381531 HER PY - 2010/// CY - Bellingham, Wash PB - SPIE KW - Extreme ultraviolet lithography - Congresses ER -