TY  - BOOK
AU  - Sturtevant, John L
TI  - Advances in resist technology and processing XXI : 23-24 February 2004, Santa Clara, California, USA
SN  - 9780819452894
U1  - 686.2325 STU 
PY  - 2004///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Microlithography - Congresses
ER  -