TY  - BOOK
AU  - Fedynyshyn, Theodore H
TI  - Advances in resist technology and processing XX : 24-26 February, 2003, Santa Clara, California, USA
SN  - 9780819448446
U1  - 621.381531 FED 
PY  - 2003///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Microlithography - Congresses
ER  -