TY  - BOOK
AU  - Houlihan, Francis M
TI  - Advances in resist technology and processing XVIII : 26-28 February, 2001, Santa Clara, [California] USA
SN  - 9780819440310
U1  - 621.381531 HOU 
PY  - 2001///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Microlithography - Congresses
ER  -