TY  - BOOK
AU  - Houlihan, Francis M
TI  - Advances in resist technology and processing XVII : 28 February-1 march, 2000, Santa Clara, USA
SN  - 9780819436177
U1  - 686.2325 HOU 
PY  - 2000///
CY  - Bellingham, WA
PB  - SPIE
KW  - Microlithography
ER  -