Will, Conley <br/><br/>
Advances in resist technology and processing XV 

 - Bellingham, WA:  SPIE,  1998 
 - v.3333. xiv, (1464) p. ; 30 cm 
<br/><br/><label>ISBN: </label>9780819427786 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Resist technology
<br/><br/><label>Dewey Class. No.: </label>670 CON