TY  - BOOK
AU  - Fedynyshyn, Theodore H
TI  - Advances in resist technology and processing XIX : 4-6 March, 2002, Santa Clara, [California] USA
SN  - 9780819444363
U1  - 621.3815 FED 
PY  - 2002///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Microlithography - Congresses
ER  -