Fedynyshn, Theodore H <br/><br/>
Advances in resist technology and processing XIX 

 - Bellingham, WA:  SPIE,  1998 
 - x, 614 p. ; 28 cm 
<br/><br/><label>ISBN: </label>9780819427786 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Resist technology
<br/><br/><label>Dewey Class. No.: </label>621.381531 FED