TY  - BOOK
AU  - Allen, Robert D
TI  - Advances in resist materials and processing technology XXVII : 22-24 February 2010, San Jose, California, United States
SN  - 9780819480538
U1  - 621.381531 ALL 
PY  - 2010///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Microlithography - Congresses
ER  -