TY  - BOOK
AU  - Dinger, Udo
TI  - Advances in mirror technology for x-ray, EUV lithography, laser and other applications II : 5 August, 2004, Denver, Colorado, USA
SN  - 9780819454713
U1  - 681.428 KHQ 
PY  - 2004///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Extreme ultraviolet lithography - Congresses
ER  -