TY  - BOOK
AU  - Dinger, Udo
TI  - Advances in mirror technology for x-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA
SN  - 9780819450661
U1  - 522.6863 KHO 
PY  - 2004///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Extreme ultraviolet lithography - Congresses
ER  -