TY  - BOOK
AU  - Assoufid, Lahsen
TI  - Advances in metrology for x-ray and EUV optics II : 30 August 2007, San Diego, California, USA
SN  - 9780819468529
U1  - 681.25 ASS 
PY  - 2007///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Laser interferometers - Congresses
ER  -