Advances in metrology for x-ray and EUV optics : 2-3 August, 2005, San Diego, California, USA 

 - Bellingham, Wash:  SPIE,  2005 
 - 1 v. (various pagings) : ill. ; 28 cm 
<br/><br/><label>ISBN: </label>9780819459268 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Laser interferometers - Congresses
<br/><br/><label>Dewey Class. No.: </label>681.25 ASS