TY  - BOOK
AU  - Progler, Christopher J
TI  - Advanced microlithography technologies : 8-10 November, 2004, Beijing, China
SN  - 9780819456007
U1  - 621.381531 WAN 
PY  - 2005///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Integrated circuits - Masks - Congresses
ER  -