Advanced microlithography technologies : 8-10 November, 2004, Beijing, China 

 - Bellingham, Wash:  SPIE,  2005 
 - xi, 380 p. : ill. ; 28 cm 
<br/><br/><label>ISBN: </label>9780819456007 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Masks - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381531 WAN