TY  - BOOK
AU  - Gupta, Subhash
TI  - Advanced microelectronic processing techniques : 28-30 November 2000, Singapore
SN  - 9780819438997
U1  - 621.38152 HAR 
PY  - 2000///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Epitaxy - Congresses
ER  -