Advanced microelectronic processing techniques : 28-30 November 2000, Singapore 

 - Bellingham, Wash:  SPIE,  2000 
 - xix, 212 p. : ill. ; 28 cm 
<br/><br/><label>ISBN: </label>9780819438997 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Epitaxy - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.38152 HAR