TY - BOOK AU - Crean, G TI - Advanced materials for interconnections : proceedings of symposium J on advanced materials for Interconnections of the 1996 E-MRS spring conference, Strasbourg, France, June 4-7,1996 SN - 9780444205070 U1 - 621.381 GES PY - 1997/// CY - Amsterdam PB - Elsevier KW - Chemical vapor deopsition - Congresses ER -