TY  - BOOK
AU  - Schoenfeld, Winston V
TI  - Advanced fabrication technologies for micro/nano optics and photonics III : 25-27 January 2010, San Francisco, California, United States
SN  - 9780819479877
U1  - 620.5 SCH 
PY  - 2010///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Microelectromechanical systems - Congresses
ER  -